-
C.G. Wilson, Y.B. Gianchandani, R.R. Arslanbekov, V.I.
Kolobov, and A.E. Wendt, "Profiling and modeling of DC nitrogen
microplasmas", J. Applied Physics 94, 2845 (2003).
-
E.A. Bogdanov, A.A. Kudryavtsev, L.D. Tsendin, R.R.
Arslanbekov, V.I. Kolobov and V.V. Kudriavtsev, "Scaling Laws
for the spatial distributions of the plasma parameters in the positive
column of a DC oxygen discharge", Technical Physics 48, 1151
(2003).
-
E.A. Bogdanov, A.A. Kudryavtsev, L.D. Tsendin, R.R.
Arslanbekov, V.I. Kolobov and V.V. Kudriavtsev, "Validation of
the two-temperature kinetic model by Comparing Calculations within
the kinetic and fluid models of the positive column plasma of a DC
oxygen discharge", Technical Physics 48, 983 (2003).
-
A.I. Fedoseyev, V.I. Kolobov, R.R. Arslanbekov, and
A. Przekwas, "Kinetic simulation tools for nano-scale semiconductor
devices", Microelectronic Engineering, 69, 577 (2003).
-
V.I. Kolobov and R.R. Arslanbekov, "Deterministic
Boltzmann solver for Electron Kinetics in Plasma Reactors for Microelectronics
Applications", Microelectronic Engineering, 69, 606 (2003).
-
R.R. Arslanbekov and V.I. Kolobov, "Two-dimensional
simulations of the transition from
Townsend to glow discharge and subnormal oscillations", accepted
by Journal of Physics D.
-
S. Yun, V.I. Kolobov and G.R. Tynan, "Neutral uniformity and
transport mechanisms
for plasma etching", Physics of Plasmas 8, 3069 (2001).
-
E.A. Bogdanov, V.I. Kolobov, A.A. Kudryavtsev, and L.D. Tsendin,
"Scaling Laws for Oxygen Discharge Plasmas", Technical Physics
47, 946 (2002).
-
C.G. Wilson, Y.B. Gianchandani, R.R. Arslanbekov, V.I. Kolobov, and
A.E. Wendt,
"Profiling and modeling of DC nitrogen microplasmas", J.
Applied Physics 94, 2845 (2003).
-
E.A. Bogdanov, A.A. Kudryavtsev, L.D. Tsendin, R.R. Arslanbekov,
V.I. Kolobov and V.V. Kudriavtsev, "Scaling Laws for the spatial
distributions of the plasma parameters in the positive column of a
DC oxygen discharge", Technical Physics 48, 1151 (2003).
-
E.A. Bogdanov, A.A. Kudryavtsev, L.D. Tsendin, R.R. Arslanbekov,
V.I. Kolobov and V.V. Kudriavtsev, "Validation of the two-temperature
kinetic model by Comparing Calculations within the kinetic and fluid
models of the positive column plasma of a DC oxygen discharge",
Technical Physics 48, 983 (2003).
-
A.I. Fedoseyev, V.I. Kolobov, R.R. Arslanbekov, and A. Przekwas,
"Kinetic simulation tools
for nano-scale semiconductor devices", Microelectronic Engineering,
69, 577 (2003).
-
V. Kolobov and R. Arslanbekov, "Deterministic Boltzmann solver
for Electron Kinetics in Plasma Reactors for Microelectronics Applications",
Microelectronic Engineering, 69, 606 (2003)
-
R.R. Arslanbekov and V.I. Kolobov, "Two-dimensional simulations
of the transition from
Townsend to glow discharge and subnormal oscillations", Journal
of Physics D 36, 1 (2003).
-
V.I. Kolobov,"Fokker Planck modeling of electron kinetics in
plasmas and semiconductors", Computational Materials Science
28, 302 (2003).
- R.R. Arslanbekov and V.I. Kolobov, "Four-Dimensional Fokker-Planck
solver for electron
kinetics in collisional gas discharge plasmas", submitted to Computer
Physics Communications.
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