CFD Research Corporation is actively involved in fundamental and applied Plasma research and development. Our current R&D Plasma activities include the following:

Enhancement of the CFD-ACE+ Plasma capabilities:

• Filament model made more powerful and user friendly. The filament model is used for setting coils and inlets in ICP reactors (see figure)
• Ion and electron inertia effects in ultra high frequency plasma sources
• Parallel plasma simulations
• CFD-ACE+SPICE link for external circuit coupled to plasma reactor simulations
• Electron Kinetics in Gas Discharges.

High Pressure Non-Thermal Plasmas

This R&D activity covers Dielectric Barrier Discharges (DBD) at atmospheric pressure, micro-plasma sources for MEMS applications, and Plasma Display Panels, among others.

Magnetic Field Effects on Charged Particle Transport Diamond Like Carbon Films

This R&D project is devoted to hydrocarbon plasma technologies. CFDRC participates in the NATO Science for Peace Project "Development of Technology and Software for Diamond-Like Carbon Deposition in Large Scale Plasma Reactors". This work is done in collaboration with Moscow State University, Russia.

Scaling laws for electronegatice and electropositive plasmas

This project involves a collaboration with
St. Petersburg University, Russia.

Nanotechnologies

KMC - FILM software has been developed at CFDRC to model surface morphology and surface kinetics during crystal growth, catalytic synthesis of carbon nanotubes (CNTs), and surface charging of semiconductor trenches. The KMC-FILM consists of the Transport module for the transport of neutral and charged particles onto the surface; Surface kinetic module for adsorption, surface diffusion, desorption, evaporation and etching; the Film/CNT growth module for assembly of atoms into a crystal film or CNT; and the Electrostatic module for the simulation of surface charging.