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CFDRC scientists and engineers have significant expertise in simulating
and analyzing electroplating systems for materials processing in
the electronics industry, including the effects of complex multi-species
electro-chemistry. This expertise can be readily applied to more
traditional electroplating and corrosion applications, as well.
Physical Models:
Physical Models :
Electroplating and corrosion are modeled in 1-D, 2-D, and 3-D by
solving systems of equations for the electrochemical reactions in
the solution and at the deposition/etch surface. These equations
are solved in conjunction with conservation equations for mass,
momentum, species, and energy (electrical and thermal). This fundamental
approach enables the analysis of
- Multi-species transport, multi-step surface reactions, and multi-species
electrochemical deposition
- The effects of additives and pulse/pulse-reverse plating on
deposition uniformity
- Tertiary, secondary, primary, and limiting current distributions
on electrochemical reaction surfaces
- High-aspect ratio seed layer and transient growth of deposited
layers on insulating substrates. (Semiconductors)
- Heat sources including Joule heating and heat generated via
electrochemical reactions
- The coupled effect of flow, heat transfer, species conservation,
and electrical conduction analysis
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Transient Deposition of
Copper via Electroplating

Configuration of a Typical
Electroplating Fountain Reactor

Prediction of Electrical
Potential Distribution

Predictions of Transient Layer Profiles & Their Comparison to
Published Data
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