The Plasma module has four main options:

• Inductively Coupled Plasmas (ICP)
  The ICP option enables the solution of the electron energy equation for electron temperature. Electron density and electrostatic field are calculated from the quasi-neutrality condition. Electron heating is produced by electromagnetic fields provided by the electromagnetic module.
• Capacitively Coupled Plasmas (CCP)
  When the CCP option is used, the electron energy equation and the electron density equation are solved to calculate electron temperature and electron number density. The electrostatic field is obtained from the solution of the Poisson equation provided by the electrostatic module.
  
• Positive Column (PC)
  The PC option is used to calculate the radial structure of the PC plasma of Direct Current (DC) discharges. This option is similar to the CCP option except that electron heating is produced by the external DC electric field.
• Global
  The global model is used for fast simulation of low-pressure plasmas, sensitivity analysis of chemistry models, and analysis of electron kinetic effects. It assumes that the losses of charged particles and active radicals in the reactor are controlled by their diffusion to the walls using a one-cell problem set up.

The Plasma Module comes with an expanded Library of Plasma Chemical reactions, and databases for electron collision cross sections and ion transport properties.

The Plasma Module has been validated and used for numerous applications in many industries. The figures on the right show some validation examples and typical applications.